| Thermal Mass Flow | Process gas monitoring, vacuum furnaces, leak-test systems, gas delivery and chamber control | Approximately 0.1 sccm to several thousand slm, depending on sensor design | Typically ±1% to ±3% of reading or full scale | Moderate; calibration gas, gas composition and operating pressure can affect accuracy | Direct mass-flow indication, good turndown, no moving parts and fast electronic output | Gas-property sensitivity; contamination or condensation can shift the thermal response |
| Laminar Differential-Pressure | Stable gas-flow measurement in vacuum manifolds, calibration benches and controlled conductance systems | Approximately 1 sccm to hundreds of slm, based on the flow element and pressure drop | Typically ±0.5% to ±2% of reading when calibrated correctly | High; differential pressure, absolute pressure, gas viscosity and temperature must be considered | Repeatable, robust and suitable for a wide range of clean gases | Requires pressure drop; performance declines if flow becomes transitional or turbulent |
| Variable-Area Flowmeter | Simple purge-flow indication, roughing-line checks and non-critical gas-flow adjustment | Commonly about 10 sccm to 1,000 slm, depending on tube size and gas | Typically ±2% to ±5% of full scale | Very high; readings depend on pressure, temperature, gas density and viscosity | Low cost, easy visual inspection, no electrical power required for indication | Limited automation, lower precision and installation orientation requirements |
| Coriolis Mass Flow | High-accuracy gas dosing, research systems and applications requiring direct mass measurement | From low milligram-per-second flow to industrial gas-flow rates, depending on tube design | Often ±0.1% to ±1% of reading, depending on range and calibration | Low compared with volumetric meters; density, vibration and installation conditions still matter | Direct mass measurement and reduced dependence on pressure and temperature compensation | Higher cost, greater pressure drop and possible sensitivity to vibration or pulsation |
| Vortex-Shedding | Medium-to-high gas-flow measurement in relatively stable process lines | Usually better suited to medium and high flow rates than to ultra-low vacuum flow | Typically ±1% to ±2% of reading over the specified range | Moderate to high; gas density, Reynolds number and pressure conditions affect the signal | No moving parts and useful for larger pipe sizes | Requires sufficient velocity; unsuitable for very low flow, strong pulsation or excessive vibration |
| Orifice / Restriction-Based DP | Rugged process monitoring where permanent pressure loss and periodic recalibration are acceptable | Broad engineering range, but the usable lower limit is restricted by differential-pressure resolution | Commonly ±1% to ±3% of reading after proper installation and compensation | High; calculation requires pressure, temperature, gas properties and geometry | Simple construction, scalable pipe sizes and well-established calculation methods | Permanent pressure loss, limited low-flow sensitivity and potential clogging at the restriction |